The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Mar. 12, 2014
Applicant:
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;
Inventor:
Ulrich Hofmann, Itzehoe, GB;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); G02B 26/085 (2013.01); G02B 26/0841 (2013.01); G02B 26/0858 (2013.01); G02B 26/101 (2013.01);
Abstract
A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame.