The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2018

Filed:

Dec. 13, 2014
Applicant:

Melexis Technologies NV, Tessenderlo, BE;

Inventors:

Ben Maes, Lommel, BE;

Carl Van Buggenhout, Aalst, BE;

Appolonius Jacobus Van Der Wiel, Duisberg, BE;

Assignee:

MELEXIS TECHNOLOGIES NV, Tessenderlo, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/12 (2006.01); G01J 5/02 (2006.01); G01J 5/16 (2006.01); G01J 5/14 (2006.01);
U.S. Cl.
CPC ...
G01J 5/023 (2013.01); G01J 5/0225 (2013.01); G01J 5/12 (2013.01); G01J 5/14 (2013.01); G01J 5/16 (2013.01); G01J 2005/123 (2013.01);
Abstract

An infrared thermal sensor for sensing infrared radiation is disclosed. The infrared thermal sensor comprises a substrate and a cap structure together forming a sealed cavity, a membrane arranged in said cavity for receiving infrared radiation (IR) through a window or aperture and a plurality of beams for suspending the membrane. At least one beam has a thermocouple arranged therein or thereon for measuring a temperature difference (ΔT) between the membrane and the substrate, the plurality of beams. Furthermore at least one beam is mechanically supporting the membrane without a thermocouple being present therein or thereon.


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