The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Dec. 18, 2015
Applicant:
Semes Co., Ltd., Cheonan-si, Chungcheongnam-do, KR;
Inventors:
Wonhaeng Lee, Cheonan-si, KR;
Kang Rae Ha, Hwasun-gun, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 31/02 (2006.01); C22C 29/12 (2006.01); H02N 13/00 (2006.01); B23K 35/32 (2006.01); B23K 35/28 (2006.01); C22C 29/02 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); B32B 15/00 (2006.01); C22C 49/06 (2006.01); C22C 49/14 (2006.01);
U.S. Cl.
CPC ...
C22C 29/12 (2013.01); B23K 35/286 (2013.01); B23K 35/325 (2013.01); B32B 15/00 (2013.01); C22C 29/02 (2013.01); C22C 49/06 (2013.01); C22C 49/14 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H02N 13/00 (2013.01);
Abstract
A fabrication method of a supporting unit supporting a substrate is provided. The fabrication method includes providing a supporting plate that is made of a non-conductive material and configured to support the substrate, providing a base plate that is disposed under the supporting plate and made of a material containing a conductive material, and forming a first metal film on a top surface of the base plate and bonding the supporting plate with the base plate through a brazing process.