The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2018

Filed:

Oct. 12, 2016
Applicant:

Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;

Inventors:

Takashi Minami, Fukuoka, JP;

Daisuke Shin, Fukuoka, JP;

Assignee:

KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); H01L 21/677 (2006.01); B25J 9/04 (2006.01); B25J 11/00 (2006.01); B25J 19/02 (2006.01);
U.S. Cl.
CPC ...
B25J 9/163 (2013.01); B25J 9/042 (2013.01); B25J 11/0095 (2013.01); B25J 19/021 (2013.01); H01L 21/6773 (2013.01); H01L 21/67706 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); Y10S 901/03 (2013.01);
Abstract

A transfer system includes a robot including a hand configured to transfer a substrate, a transfer chamber within which the robot is disposed, a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view, and a robot control device configured to control an operation of the robot based on teaching information. The robot control device includes an operation controller configured to cause the robot to transfer the substrate to a storage position while slanting a hand centerline toward the robot away from a storage centerline with respect to a first cassette and while superimposing the hand centerline on the storage centerline with respect to a second cassette.


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