The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Nov. 12, 2015
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Toshio Nishimura, Nagaokakyo, JP;

Keiichi Umeda, Nagaokakyo, JP;

Takashi Hase, Nagaokakyo, JP;

Keisuke Takeyama, Nagaokakyo, JP;

Takehiko Kishi, Nagaokakyo, JP;

Hiroshi Yamada, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/09 (2006.01); H03H 9/05 (2006.01); H03H 9/24 (2006.01); H01L 41/047 (2006.01); H01L 41/083 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); H01L 41/047 (2013.01); H01L 41/083 (2013.01); H03H 9/02448 (2013.01); H03H 9/0595 (2013.01); H03H 9/2452 (2013.01); H03H 2009/155 (2013.01);
Abstract

A vibrating device that is in the form of a rectangular plate having opposed long sides and opposed short sides, and that utilizes an expanding and contracting vibration mode in a direction of the short sides. The vibrating device includes a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer. When a total thickness of the Si layer is denoted by T, a total thickness of the silicon oxide layer is denoted by T, and the TCF in the vibrating device when the silicon oxide layeris not provided is denoted by x(ppm/K), T/(T+T) is within a range of (−0.0003x−0.0256x+0.0008)±0.05.


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