The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Dec. 10, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Masato Ishii, Sunnyvale, CA (US);
Mehmet Tugrul Samir, Mountain View, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Jeffrey Tobin, Mountain View, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); C30B 25/12 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C30B 25/12 (2013.01); C30B 35/005 (2013.01); H01L 21/67115 (2013.01); H01L 21/67748 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68764 (2013.01);
Abstract
In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.