The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Nov. 06, 2013
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
Hirohiko Goto, Akashi, JP;
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Abstract
Substrate transferring apparatus includes a first-hand mechanism and second hand mechanism. The first-hand mechanism includes a first lower arm, first upper arm, first-hand having a tip end portion as a first substrate holding portion, and first driven mechanism to rotate the first-hand with rotation of the first upper arm. The first-hand mechanism so the first substrate holding portion movable by rotations of the first lower arm, first upper arm, and first-hand between a contracted and extended positions. The second-hand mechanism includes a second lower arm, second upper arm, second-hand having a tip end portion as a second substrate holding portion, and second driven mechanism to rotate the second-hand with rotation of the second upper arm. The second-hand mechanism so the second substrate holding portion movable by rotations of the second lower arm, second upper arm, and second-hand in sync with the first substrate holding portion between a contracted and extended positions.