The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Aug. 19, 2015
Junji Kido, Yamagata, JP;
Junji Kido, Yamagata, JP;
Other;
Abstract
A laser annealing device includes a laser beam source, a laser beam irradiating optical system that irradiates a treatment area of a treatment object substrate with a laser beam emitted from the laser beam source, an illumination light source that emits illumination light in a visible light region, an illumination optical system that irradiates the treatment area with light emitted from the illumination light source, and a spectral detector that detects light in the visible light region that has been reflected by the treatment area in which an annealing treatment has been performed with the laser beam, and outputs spectral characteristics of the light.
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