The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Sep. 10, 2013
Applicant:

Kobelco Research Institute, Inc., Kobe-shi, JP;

Inventors:

Yuki Tao, Hyogo, JP;

Moriyoshi Kanamaru, Hyogo, JP;

Akira Nambu, Hyogo, JP;

Hideo Hata, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); H01J 37/34 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C23C 14/086 (2013.01); H01J 37/3426 (2013.01); H01J 2237/3322 (2013.01);
Abstract

An oxide sintered body is obtained by mixing and sintering a zinc oxide, an indium oxide, a gallium oxide and a tin oxide. The oxide sintered body has a relative density of 85% or more, and has volume ratios satisfying the following expressions (1) to (3), respectively, as determined by X•ray diffractometry: (1) (ZnSnOphase+InGaZnOphase)/(ZnSnOphase+InGaZnOphase+InOphase+SnOphase+(ZnO)InO, phase)≧75% by volume; (2) ZnSnOphase/(ZnSnOphase+InGaZnOphase+InOphase+SnOphase+(ZnO)InOphase)≧30% by volume; and (3) InGaZnOphase/(ZnSnOphase+InGaZnOphase+InOphase+SnOphase+(ZnO)InOphase)≧10% by volume, and m represents an integer of 2 to 5.


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