The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Aug. 04, 2010
Applicants:
M. S. M. Saifullah, Singapore, SG;
Hazrat Hussain, Singapore, SG;
Suhui Lim, Singapore, SG;
Hong Yee Low, Singapore, SG;
Wei Wei Loh, Singapore, SG;
Inventors:
M. S. M. Saifullah, Singapore, SG;
Hazrat Hussain, Singapore, SG;
Suhui Lim, Singapore, SG;
Hong Yee Low, Singapore, SG;
Wei Wei Loh, Singapore, SG;
Assignee:
Agency For Science, Technology And Research, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 43/02 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 43/021 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); B29C 2043/025 (2013.01);
Abstract
A method of reducing the dimension of an imprint structure on a substrate, the method comprising the steps of: