The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Nov. 27, 2015
Applicant:

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventors:

Sotaro Kishida, Kyoto, JP;

Ryota Nakayama, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); G01R 17/02 (2006.01); G01L 1/14 (2006.01); G01L 9/00 (2006.01); G01L 9/12 (2006.01);
U.S. Cl.
CPC ...
G01R 17/02 (2013.01); G01L 1/142 (2013.01); G01L 1/144 (2013.01); G01L 9/0072 (2013.01); G01L 9/12 (2013.01);
Abstract

The present invention includes a detecting capacitor of which the capacitance is changed depending on pressure; a fixed capacitor having reference capacitance; an initial voltage application part that applies an initial voltage having a predetermined frequency to the detecting capacitor and the fixed capacitor; a first operational amplifier that outputs an output voltage based on a partial voltage applied to at least the detecting capacitor; a reference voltage generation part that generates a reference voltage that serves as a reference for a change in the output voltage of the first operational amplifier and has the same frequency as that of the initial voltage; a second operational amplifier that outputs an output voltage based on the difference between the output voltage of the first operational amplifier and the reference voltage; and a pressure operation part that operates a pressure from the amplitude of the output voltage of the second operational amplifier.


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