The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Jun. 05, 2017
Applicant:

Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Patrick Allen Lowery, Reno, NV (US);

John Thomas Dick, Reno, NV (US);

Michael Alex Kramer, Sparks, NV (US);

Assignee:

HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/14 (2006.01); F16K 37/00 (2006.01); G01D 5/20 (2006.01); G01D 11/24 (2006.01); G01F 1/00 (2006.01);
U.S. Cl.
CPC ...
F16K 37/0041 (2013.01); G01D 5/20 (2013.01); G01D 11/245 (2013.01); G01F 1/00 (2013.01);
Abstract

A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.


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