The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Jan. 13, 2015
Applicant:
Nextinput, Inc., San Jose, CA (US);
Inventors:
Amnon Brosh, Santa Monica, CA (US);
Ryan Diestelhorst, San Jose, CA (US);
Steven Nasiri, Los Altos Hills, CA (US);
Assignee:
NEXTINPUT, INC., Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01L 1/18 (2006.01); G01L 1/20 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0056 (2013.01); B81C 1/00626 (2013.01); G01L 1/18 (2013.01); G01L 1/205 (2013.01); B81B 2201/0292 (2013.01);
Abstract
Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.