The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Jun. 22, 2015
Applicant:

Digitaloptics Corporation Mems, San Jose, CA (US);

Inventors:

Robert J. Calvet, Arcadia, CA (US);

Guiqin Wang, Arcadia, CA (US);

Roman C. Gutierrez, Arcadia, CA (US);

Xiaolei Liu, Arcadia, CA (US);

Assignee:

DigitalOptics Corporation MEMS, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); H02N 1/00 (2006.01); G02B 7/08 (2006.01); G03B 3/10 (2006.01); G03B 13/00 (2006.01); G03B 17/00 (2006.01); G02B 7/09 (2006.01); G02B 13/00 (2006.01);
U.S. Cl.
CPC ...
H02N 1/008 (2013.01); G02B 7/08 (2013.01); G02B 7/09 (2013.01); G02B 13/001 (2013.01); G03B 3/10 (2013.01); G03B 13/00 (2013.01); G03B 17/00 (2013.01); G03B 2205/0007 (2013.01); G03B 2205/0046 (2013.01); G03B 2205/0053 (2013.01); G03B 2205/0061 (2013.01); Y10T 29/49826 (2015.01);
Abstract

In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.


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