The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Sep. 29, 2013
Applicant:

Apple Inc., Cupertino, CA (US);

Inventors:

Lili Huang, San Jose, CA (US);

Richard M. Mank, Cupertino, CA (US);

Yanfeng Chen, San Ramon, CA (US);

Assignee:

Apple Inc., Cupertino, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01M 4/04 (2006.01); H01M 4/1391 (2010.01); H01M 4/36 (2006.01); H01M 4/525 (2010.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H01M 10/052 (2010.01);
U.S. Cl.
CPC ...
H01M 4/0426 (2013.01); C23C 14/08 (2013.01); C23C 14/3492 (2013.01); H01M 4/1391 (2013.01); H01M 4/366 (2013.01); H01M 4/525 (2013.01); H01M 10/052 (2013.01);
Abstract

A method for improving the lithium cobalt oxide (LiCoO2) film (such as films in thin film batteries) morphology includes using oxygen (O2) and argon (Ar) gases during sputtering deposition of the LiCoO2 film. This may allow for the manufacturing of thicker LiCoO2 films. Such a method may also significantly reduce or eliminate cracking and obvious columnar structures within the resulting LiCoO2 film layer. Sputtering using a mixture of O2 and Ar also may produce a LiCoO2 film layer that requires lower annealing temperatures to reach good utilization and has higher lithium diffusion rates.


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