The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Oct. 27, 2015
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Akira Nakajima, Ibaraki, JP;

Yoshiaki Yamamoto, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/532 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/53238 (2013.01); H01L 21/76847 (2013.01); H01L 21/76867 (2013.01); H01L 21/76882 (2013.01); H01L 24/05 (2013.01); H01L 24/06 (2013.01); H01L 2224/05553 (2013.01);
Abstract

The reliability of a copper wire is improved without inhibiting the wiring resistance of the copper wire. For example, another metallic element segregates in the boundary region between a copper film CUFand a copper film CUF, and at the upper side face part of a wiring gutter leading to the boundary region. In a sectional view, a metallic element having a reducing power higher than copper segregates at the inner part of the copper wire apart from both the surface of the copper wire and the bottom face of the wiring gutter and at the side face part of the copper wire. In a sectional view, a metallic element different from copper segregates in the vicinity of the center part of the copper wire and at the side face part of the copper wire.


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Nakajima, Akira. (2018). Semiconductor device with inhibited electromigration and manufacturing method thereof (U.S. Patent No. 9899326). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9899326

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