The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Jun. 09, 2015
Applicant:
Gudeng Precision Industrial Co., Ltd, New Taipei, TW;
Inventors:
Chin-Ming Lin, New Taipei, TW;
Ming-Chien Chiu, New Taipei, TW;
Jui-Ken Kao, New Taipei, TW;
Chen-Hao Chang, New Taipei, TW;
Assignee:
GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65B 3/04 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); Y10T 137/86212 (2015.04);
Abstract
The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.