The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Apr. 15, 2016
Applicant:

The University of Rochester, Rochester, NY (US);

Inventors:

Alexander Shestopalov, Rochester, NY (US);

James McGrath, Fairport, NY (US);

Xunzhi Li, Rochester, NY (US);

Assignee:

The University of Rochester, Rochester, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/02 (2006.01); C23C 16/00 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0228 (2013.01); C23C 16/00 (2013.01); C23C 16/482 (2013.01); H01L 21/02112 (2013.01);
Abstract

Methods and compositions for depositing a monolayer onto a surface of a substrate are described. The method can include contacting the surface with a vapor phase comprising a carbene source, and reacting a carbene group from the carbene source with a functional group on the surface, to obtain a covalently bound monolayer on the surface of the substrate. The carbene source can be a diazirine compound. The functional group on the surface can be a C—H containing group, a Si—H containing group, among others, or combinations thereof. The method can further involve removing physisorbed molecules from the surface of the substrate.


Find Patent Forward Citations

Loading…