The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Jan. 30, 2013
Applicant:
Akribis Systems Pte Ltd, Singapore, SG;
Inventors:
Assignee:
AKRIBIS SYSTEMS PTE LTD, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01); G05B 19/418 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G05B 19/418 (2013.01); G03F 7/70758 (2013.01); H01L 21/68 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/45032 (2013.01); G05B 2219/49276 (2013.01);
Abstract
A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.