The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Aug. 03, 2015
Koninklijke Philips N.v., Eindhoven, NL;
KONINKLIJKE PHILIPS N.V., Eindhoven, NL;
Abstract
The present invention relates to an optical device and a method of in situ treating an optical component () reflecting EUV and/or soft X-ray radiation in said optical device, said optical component () being arranged in a vacuum chamber () of said optical device and comprising one or several reflecting surfaces () having a top layer of one or several surface materials. In the method, a source () of said one or several surface materials is provided in said chamber () of said optical device and surface material from said source () is deposited on said one or several reflecting surfaces () during operation and/or during operation-pauses of said optical device in order to cover or substitute deposited contaminant material and/or to compensate for ablated surface material.