The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Nov. 25, 2014
Applicant:

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventors:

Sotaro Kishida, Kyoto, JP;

Takehisa Hataita, Kyoto, JP;

Akira Kuwahara, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 19/00 (2006.01); G01L 19/04 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0072 (2013.01); G01L 9/0042 (2013.01); G01L 19/0084 (2013.01); G01L 19/04 (2013.01); G01L 19/069 (2013.01);
Abstract

Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.


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