The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Mar. 11, 2014
Applicant:
Kobe Steel, Ltd., Kobe-shi, JP;
Inventor:
Hirofumi Fujii, Takasago, JP;
Assignee:
Kobe Steel, Ltd., Kobe-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01K 5/00 (2006.01); G01K 9/00 (2006.01); G01K 5/50 (2006.01); C23C 14/52 (2006.01); C23C 14/54 (2006.01); C23C 16/52 (2006.01); G01N 25/00 (2006.01);
U.S. Cl.
CPC ...
G01K 5/50 (2013.01); C23C 14/52 (2013.01); C23C 14/541 (2013.01); C23C 16/52 (2013.01); G01N 25/00 (2013.01);
Abstract
A processing apparatus and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus includes a chamber containing a workpiece, a measurement piece installed in the chamber, and a measuring unit. The measurement piece is capable of thermal expansion and contraction in response to an internal temperature of the chamber. The measuring unit measures a thermal expansion and contraction amount of the measurement piece to thereby measure the real temperature of the workpiece.