The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Feb. 09, 2015
Applicant:

Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong, CN;

Inventors:

Tsungyuan Wu, Guangdong, CN;

Yawei Liu, Guangdong, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/04 (2013.01); C23C 14/24 (2013.01); H01L 51/001 (2013.01); H01L 51/0011 (2013.01);
Abstract

The present invention provides an OLED material vacuum thermal evaporating mask plate, comprising a mask frame (), a quickset () fixed on the mask frame () and a mask () fixed on the quickset (); the mask frame () comprises four edges, and the four edges surround to form an opening corresponding to the mask (); each edge of the mask frame () comprises a groove () dented at the upper surface; the quickset () is fixed in the groove (); the mask () is fixed on the quickset () by point weld, and welding points () are on the quickset (). When the mask deforms and the replacement is necessary, only the quickset is extracted for polishing or is replaced. The mask frame can be repeatedly used to diminish the waste amount and to raise the availability of the mask frame. Meanwhile, the spare amount of the mask frame can be reduced to save material and production cost.


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