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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9895723 B1

PDFFull Text
Date of Patent:
Feb. 20, 2018

Filed:

Mar. 31, 2016

Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method

Applicant:

Tdk Corporation, Minato-ku, Tokyo, JP;

Inventor:

Tadamasa Iwamoto, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:

Arent Fox LLP

Primary Examiner:

Paul R Durand

Assistant Examiner:

Randall Gruby

Int. Cl.
CPC ...
B65B 31/00 (2006.01); B08B 5/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); B08B 9/00 (2006.01);
U.S. Cl.
CPC ...
B08B 5/00 (2013.01); H01L 21/67259 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01); H01L 21/67775 (2013.01); B08B 9/00 (2013.01);
Abstract

In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container is filled with a cleaning gas until just before transportation, and a placement failure does not happen to the next purging container to be placed. A purge nozzle is moved to a direction separating from a purge port after detecting a movement of a table on which the purging container is installed to an undock position and a stop of a feeding of the cleaning gas.

Find Patent Forward Citations

Iwamoto, Tadamasa. (2018). Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method (U.S. Patent No. 9895723). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9895723

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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