The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Feb. 03, 2016
Applicant:
Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Inventor:
Jin Goo Kang, Suwon-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-Si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/04 (2006.01); B01D 53/26 (2006.01); B01D 53/86 (2006.01);
U.S. Cl.
CPC ...
B01D 53/0407 (2013.01); B01D 53/261 (2013.01); B01D 2253/108 (2013.01); B01D 2253/116 (2013.01); B01D 2253/1122 (2013.01); B01D 2255/20761 (2013.01); B01D 2257/104 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/40098 (2013.01);
Abstract
An apparatus for treating a substrate, including a chamber; a substrate treater in the chamber; a purifier connected to the chamber, the purifier to purify polluted air in the chamber; a light source in the chamber, the light source to irradiate light; and a light-shield to block the light irradiated by the light source from arriving at the substrate treater.