The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Jan. 13, 2014
Applicant:
Yokogawa Electric Corporation, Musashino-shi, Tokyo, JP;
Inventors:
Assignee:
Yokogawa Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N 11/00 (2006.01); H03H 3/007 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H02N 11/00 (2013.01); H03H 3/0072 (2013.01); H03H 9/2463 (2013.01); Y10T 29/49007 (2015.01);
Abstract
A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.