The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Jun. 16, 2009
Anqing Cui, Sunnyvale, CA (US);
Binh Tran, San Jose, CA (US);
Alexander Tam, Union City, CA (US);
Jacob W. Smith, Santa Clara, CA (US);
R. Suryanarayanan Iyer, Santa Clara, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Sean M. Seutter, San Jose, CA (US);
Anqing Cui, Sunnyvale, CA (US);
Binh Tran, San Jose, CA (US);
Alexander Tam, Union City, CA (US);
Jacob W. Smith, Santa Clara, CA (US);
R. Suryanarayanan Iyer, Santa Clara, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Sean M. Seutter, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus, reactors, and methods for heating substrates are disclosed. The apparatus comprises a stage comprising a body and a surface having an area to support a substrate, a shaft coupled to the stage, a first heating element disposed within a central region of the body of the stage, and at least second and third heating elements disposed within the body of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other.