The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Jul. 08, 2015
Applicant:

Shenzhen China Star Optoelectronics Technology Co., Ltd., Guangdong, CN;

Inventor:

Jia Li, Guangdong, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/20 (2006.01); H01L 21/67 (2006.01); B05B 13/02 (2006.01); B05B 15/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6708 (2013.01); B05B 13/0278 (2013.01); B05B 15/08 (2013.01); H01L 21/6715 (2013.01); B05B 1/20 (2013.01);
Abstract

A spray assembly including a spray pipe with a bottom provided with a plurality of first through holes, each having a nozzle, wherein the nozzle includes a slider with an area larger than the first through hole, to cover the first through hole. The nozzle is connected to the slider and protrudes from the first through hole; the nozzle also includes a locking member to connect the slider to the spray pipe. The slider can move to adjust the position of the nozzle in the first through hole. There also provides a wet etching device including a spray unit, wherein the spray unit includes a plurality of spray assemblies as mentioned above, and a plurality of spray pipes in the plurality of spray assemblies are arranged in parallel with each other or approximately in parallel with each other.


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