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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9892892 B1

PDFFull Text
Date of Patent:
Feb. 13, 2018

Filed:

Mar. 01, 2016

Method of manufacturing electron multiplier body, photomultiplier tube, and photomultiplier

Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Motohiro Suyama, Hamamatsu, JP;

Hiroshi Kobayashi, Hamamatsu, JP;

Shinya Hattori, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:

Drinker Biddle & Reath LLP

Primary Examiner:

Joseph L Williams

Assistant Examiner:

Jose M Diaz

Int. Cl.
CPC ...
H01J 43/10 (2006.01); H01J 9/12 (2006.01); H01J 43/16 (2006.01); B32B 3/00 (2006.01); H01J 43/24 (2006.01); B32B 9/00 (2006.01); B32B 9/04 (2006.01); C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
H01J 43/10 (2013.01); B32B 3/00 (2013.01); B32B 9/005 (2013.01); B32B 9/04 (2013.01); C23C 14/00 (2013.01); H01J 9/125 (2013.01); H01J 43/16 (2013.01); H01J 43/24 (2013.01); B32B 2457/20 (2013.01);
Abstract

A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.

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