The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Dec. 07, 2015
Applicant:

Metal Industries Research & Development Centre, Kaohsiung, TW;

Inventors:

Hsiu-An Tsai, Tainan, TW;

Nai-Chun An, Kaohsiung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/34 (2006.01); G02B 26/08 (2006.01); G02B 27/28 (2006.01); G02B 5/30 (2006.01); G01D 5/26 (2006.01); G01D 5/347 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0816 (2013.01); G01D 5/266 (2013.01); G01D 5/3473 (2013.01); G02B 5/3083 (2013.01); G02B 27/283 (2013.01);
Abstract

An optical measurement system including a two-dimensional sine wave annuls grating and a measurement unit is provided. The two-dimensional sine wave annuls grating includes a rotary shaft and a plurality of sine wave structures surrounding the rotary shaft and continuously arranged. The measurement unit is adapted to output a light beam towards the two-dimensional sine wave annuls grating, wherein each of the sine wave structures is adapted to reflect the light beam from the two-dimensional sine wave annuls grating back to the measurement unit. A measurement method for errors of a rotating platform and a two-dimensional sine wave annuls grating are also provided.


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