The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Oct. 10, 2012
Applicant:
Nikon Corporation, Chiyoda-ku, Tokyo, JP;
Inventor:
Hiroshi Aoki, Yokohama, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01B 11/2527 (2013.01);
Abstract
There is provided a form measuring apparatus including: an imager configured to take an image of a object, an irradiator configured to irradiate a measurement light from a projection direction different from the direction along which the imager performs imaging to form a predetermined light amount distribution on the object, a reference light generator configured to generate a reference light to irradiate the object, and a detector configured to detect a target area for form measurement of the object based on a pickup image taken by the imager as the reference light is irradiated on the object.