The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Nov. 28, 2013
Applicant:

Oerlikon Surface Solutions Ag, Trubbach, Trubbach, CH;

Inventors:

Jurgen Ramm, Maienfeld, CH;

Beno Widrig, Bad Ragaz, CH;

Matthias Lukas Sobiech, Wasserburg, DE;

Doris Fopp-Spori, Landquart, CH;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/32 (2006.01); C23C 14/14 (2006.01); C23C 14/06 (2006.01); C22C 27/04 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/14 (2013.01); C22C 27/04 (2013.01); C23C 14/0641 (2013.01); C23C 14/325 (2013.01); H01J 37/3255 (2013.01); H01J 37/32614 (2013.01);
Abstract

A coating method based on gas phase deposition by arc evaporation, with the steps: selecting a first target as a material source for the coating; providing a coating chamber with an arc evaporation source including the selected target; loading the chamber with substrates to be coated; pumping down the chamber to a process pressure suitable for the arc evaporation; and igniting and operating the arc such that material is evaporated from the first target and is then deposited on the substrates to be coated, optionally after reaction with a reactive gas admitted into the coating chamber. The first target includes at least one matrix component and one doping component such that the doping component has a melting point at least 500° C. lower than the matrix component, and a melted drop of the doping component on a solid surface of the matrix component assumes a contact angle of a least 90°.


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