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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9889630 B1

PDFFull Text
Date of Patent:
Feb. 13, 2018

Filed:

Aug. 05, 2009

Polishing equipment having discontinuous adhesion points and method for making the sheet

Applicants:

Chung-chih Feng, Kaohsiung, TW;

I-peng Yao, Kaohsiung, TW;

Lyang-gung Wang, Kaohsiung, TW;

Wen-chieh Wu, Kaohsiung, TW;

Inventors:

Chung-Chih Feng, Kaohsiung, TW;

I-Peng Yao, Kaohsiung, TW;

Lyang-Gung Wang, Kaohsiung, TW;

Wen-Chieh Wu, Kaohsiung, TW;

Assignee:

BESTAC ADVANCED MATERIAL CO., LTD., Taoyuan County, TW;

Attorneys:

WPAT, P.C., Intellectual Property Attorneys

Anthony King

Primary Examiner:

Sheeba Ahmed

Int. Cl.
CPC ...
B32B 7/14 (2006.01); B32B 27/40 (2006.01); B32B 27/34 (2006.01); B32B 27/32 (2006.01); B32B 27/30 (2006.01); B32B 27/06 (2006.01); B24B 37/30 (2012.01); B32B 37/12 (2006.01);
U.S. Cl.
CPC ...
B32B 7/14 (2013.01); B24B 37/30 (2013.01); B32B 27/065 (2013.01); B32B 27/302 (2013.01); B32B 27/304 (2013.01); B32B 27/306 (2013.01); B32B 27/32 (2013.01); B32B 27/34 (2013.01); B32B 27/40 (2013.01); B32B 37/1292 (2013.01); B32B 2266/025 (2013.01); B32B 2266/0221 (2013.01); B32B 2266/0228 (2013.01); B32B 2266/0235 (2013.01); B32B 2266/0257 (2013.01); B32B 2266/0278 (2013.01); B32B 2429/00 (2013.01); B32B 2457/00 (2013.01); B32B 2457/08 (2013.01); B32B 2457/202 (2013.01); B32B 2551/00 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24562 (2015.01);
Abstract

The sheet of a polishing equipment of the present invention includes a buffer layer, an adsorption layer, and an adhesion layer. The adhesion layer is disposed between the buffer layer and the adsorption layer. The adhesion layer has a plurality of adhesion points to bind the buffer layer and the adsorption layer together. The adhesion points are discontinuous and have gaps in between. Consequently, when the sheet is pressed, air can be vented out through the gaps between the adhesion points, so that the adsorption force is increased.

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