The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Mar. 09, 2015
Koninklijke Philips N.v., Eindhoven, NL;
Ruediger Mauczok, Erkelenz, DE;
Bout Marcelis, Eindhoven, NL;
Koninklijke Philips N.V., Eindhoven, NL;
Abstract
Disclosed is a method of manufacturing a device () comprising a plurality of micro-machined ultrasonic transducer cells () in a first region () on a substrate () and a plurality of interconnects () in a second region () on said substrate, each of said cells comprising a first electrode () separated by a cavity () from a second electrode () supported by a membrane (), the method comprising forming a dielectric layer stack () over the substrate, said dielectric layer stack defining the respective membranes of the micro-machined ultrasonic transducers in the first region; reducing the thickness of the dielectric layer stack in the second region by partially etching away the dielectric layer stack in the second region; etching a plurality of trenches () in the reduced thickness portion of the dielectric layer stack, each of said trenches exposing a conductive contact () in the second region; and filling said trenches with a conductive material. A device manufactured in accordance with this method and an apparatus including the device are also disclosed.