The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2018

Filed:

Jul. 30, 2015
Applicant:

Edwards Vacuum Llc, Sanbom, NY (US);

Inventors:

Budd Edward Faulkner, Hillsboro, OR (US);

Peter George Stammers, Eastbourne, GB;

Brett Trevor Lawrence, Bexhill on Sea, GB;

Craig Richard Charles Turner, Heathfield, GB;

Brent Haslett, Bexhill on Sea, GB;

Nicholas Daniel Hutton, Eastbourne, GB;

Matthew Demian Klepp, Portland, OR (US);

Mark Kollin Romeo, North Plains, OR (US);

Assignee:

Edwards Vacuum LLC, Sandom, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/02 (2006.01); H05B 3/02 (2006.01); G01R 31/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
H05B 1/0202 (2013.01); G01R 31/00 (2013.01); H01L 21/00 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01);
Abstract

A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value Rfor the group of electric heaters, compare the resistance value Rwith a reference resistance value Rand judge a fault condition if the resistance value Rdiffers from the reference resistance value Rby more than a predetermined amount.


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