The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Mar. 31, 2015
Applicant:
Robert Bosch Gmbh, Stuttgart, DE (US);
Inventors:
Brett Mathew Diamond, Pittsburgh, PA (US);
John M. Muza, Venetia, PA (US);
John W. Zinn, Canonsburg, PA (US);
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 25/00 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01); H04R 1/04 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H04R 19/005 (2013.01); H04R 1/04 (2013.01); H04R 19/04 (2013.01); H04R 31/003 (2013.01); H04R 31/006 (2013.01); H04R 2201/003 (2013.01);
Abstract
Systems and methods for preventing electrical leakage in a MEMS microphone. In one embodiment, the MEMS microphone includes a semiconductor substrate, an electrode, a first insulation layer, and a doped region. The first insulation layer is formed between the electrode and the semiconductor substrate. The doped region is implanted in at least a portion of the semiconductor substrate where the semiconductor substrate is in contact with the first insulation layer. The doped region is also electrically coupled to the electrode.