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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9887361 B1

PDFFull Text
Date of Patent:
Feb. 06, 2018

Filed:

Aug. 06, 2015

Methods for forming a carbon nanotube-graphene hybrid film on a substrate

Applicants:

International Business Machines Corporation, Armonk, NY (US);

Egypt Nanotechnology Center, Cairo, EG;

Inventors:

Ageeth A. Bol, Yorktown Heights, NY (US);

Bhupesh Chandra, Jersey City, NJ (US);

Amal Kasry, White Plains, NY (US);

Ahmed Maarouf, Mohegan Lake, NY (US);

Glenn J. Martyna, Croton on Hudson, NY (US);

George S. Tulevski, White Plains, NY (US);

Assignees:

International Business Machines Corporation, Armonk, NY (US);

Egypt Nanotechnology Center, Cairo, EG;

Attorney:

Ryan, Mason & Lewis, LLP

Primary Examiner:

Bret Chen

Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/26 (2006.01); H01L 51/00 (2006.01); H01L 51/05 (2006.01); H01B 1/04 (2006.01); H01L 51/10 (2006.01); H01L 29/16 (2006.01); H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); C01B 32/158 (2017.01); C01B 32/182 (2017.01); C01B 32/186 (2017.01); C01B 32/192 (2017.01); H01L 29/06 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 51/0048 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C01B 32/158 (2017.08); C01B 32/182 (2017.08); C01B 32/186 (2017.08); C01B 32/192 (2017.08); C23C 16/26 (2013.01); H01B 1/04 (2013.01); H01L 29/1606 (2013.01); H01L 29/66742 (2013.01); H01L 29/778 (2013.01); H01L 29/78618 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01); H01L 51/0025 (2013.01); H01L 51/0545 (2013.01); H01L 51/0562 (2013.01); H01L 51/102 (2013.01); H01L 51/105 (2013.01); B82Y 30/00 (2013.01); C01B 2202/00 (2013.01); C01B 2204/00 (2013.01); H01L 29/0673 (2013.01); H01L 51/0566 (2013.01); Y10S 977/742 (2013.01); Y10S 977/75 (2013.01); Y10S 977/938 (2013.01); Y10T 428/30 (2015.01);
Abstract

A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. A method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate.

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