The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2018

Filed:

Nov. 17, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Makoto Kubota, Yokohama, JP;

Takanori Matsuda, Chofu, JP;

Kaoru Miura, Matsudo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/187 (2006.01); B06B 1/06 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H02N 2/18 (2006.01); H03H 9/64 (2006.01); G02B 26/02 (2006.01); G02B 26/08 (2006.01); H02N 2/10 (2006.01); H02N 2/16 (2006.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); B06B 1/06 (2013.01); B06B 1/0644 (2013.01); B41J 2/14233 (2013.01); G02B 26/02 (2013.01); G02B 26/08 (2013.01); H01L 41/047 (2013.01); H01L 41/0471 (2013.01); H01L 41/0815 (2013.01); H01L 41/09 (2013.01); H01L 41/0973 (2013.01); H02N 2/103 (2013.01); H02N 2/16 (2013.01); H02N 2/186 (2013.01); H03H 9/64 (2013.01); B41J 2202/03 (2013.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H03H 9/02015 (2013.01); H03H 9/02543 (2013.01);
Abstract

A piezoelectric element includes a substrate, a first electrode, a piezoelectric film and a second electrode that are sequentially placed in the above-mentioned order. The piezoelectric film contains oxides of Ba, Bi, Ti, Zr, Fe and Mn and has a perovskite structure, wherein the molar ratio y of Bi relative to the sum of Ba and Bi is 0.001≦y≦0.015, the molar ratio x of Zr relative to the sum of Ti, Zr, Fe and Mn is 0.010≦x≦0.060, the molar ratio z of Fe relative to the sum of Ti, Zr, Fe and Mn is 0.001≦z≦0.015, and the molar ratio m of Mn relative to the sum of Ti, Zr, Fe and Mn is 0.0020≦m≦0.0150, while the relationship between y and z is expressed by 0.90≦y/z≦1.10.


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