The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Jan. 19, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Yi Cui, San Jose, CA (US);
Tae Kyung Won, San Jose, CA (US);
Dong-kil Yim, Pleasanton, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, unknown;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/31 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66969 (2013.01); H01L 21/0234 (2013.01); H01L 23/3171 (2013.01); H01L 29/7869 (2013.01); H01L 2924/0002 (2013.01);
Abstract
Techniques are disclosed for methods of post-treating an etch stop or a passivation layer in a thin film transistor to increase the stability behavior of the thin film transistor.