The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Mar. 30, 2015
Applicant:
James Moyne, Canton, MI (US);
Inventor:
James Moyne, Canton, MI (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01); G05B 13/02 (2006.01); G05B 23/02 (2006.01); G06N 5/04 (2006.01);
U.S. Cl.
CPC ...
G05B 13/026 (2013.01); G05B 23/0297 (2013.01); G06N 5/04 (2013.01); G05B 2219/31459 (2013.01); G05B 2219/31465 (2013.01); G05B 2219/31483 (2013.01);
Abstract
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.