The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Apr. 10, 2014
Applicant:
Dcg Systems, Inc., Fremont, CA (US);
Inventor:
Keith Serrels, Fremont, CA (US);
Assignee:
FEI EFA, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/58 (2006.01); G02B 21/32 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/58 (2013.01); G02B 21/002 (2013.01); G02B 21/32 (2013.01);
Abstract
A system and method for obtaining super-resolution image of an object. An illumination beam is directed through an optical axis onto the object to be imaged. Paraxial rays of the illumination beam are deflected away from the optical axis and into a beam dump. The non-paraxial rays are collected after being reflected by the object so as to generate an image only from the non-paraxial rays.