The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Sep. 03, 2015
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Masatoshi Tsuji, Kanagawa, JP;
Masayuki Hatano, Kanagawa, JP;
Yohko Komatsu, Kanagawa, JP;
Tetsuro Nakasugi, Kanagawa, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); C23F 1/16 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
C23F 1/16 (2013.01); G03F 7/0002 (2013.01);
Abstract
According to one embodiment, a template forming method is provided. In the template forming method, a template pattern is formed on a first surface of a substrate. A high liquid repellent property portion is formed in a region different from the template pattern on a side of the first surface of the substrate. The high liquid repellent property portion has a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein.