The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Feb. 11, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Dmitry Lubomirsky, Cupertino, CA (US);
Sung Je Kim, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 22/66 (2006.01); H01J 37/32 (2006.01); C23C 16/455 (2006.01); H01L 21/67 (2006.01); C23C 14/22 (2006.01); C23C 16/50 (2006.01); H01L 21/673 (2006.01); C23C 22/56 (2006.01); C23F 1/20 (2006.01); C23F 1/32 (2006.01); C23F 1/36 (2006.01); C23F 1/16 (2006.01);
U.S. Cl.
CPC ...
C23C 22/66 (2013.01); C23C 14/22 (2013.01); C23C 16/45525 (2013.01); C23C 16/45527 (2013.01); C23C 16/50 (2013.01); C23C 22/56 (2013.01); H01J 37/32009 (2013.01); H01J 37/3244 (2013.01); H01J 37/3255 (2013.01); H01J 37/32532 (2013.01); H01L 21/67069 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/67306 (2013.01); C23F 1/16 (2013.01); C23F 1/20 (2013.01); C23F 1/32 (2013.01); C23F 1/36 (2013.01); Y10T 428/24322 (2015.01); Y10T 428/24355 (2015.01);
Abstract
A method for conditioning a semiconductor chamber component may include passivating the chamber component with an oxidizer. The method may also include performing a number of chamber process operation cycles in a semiconductor processing chamber housing the chamber component until the process is stabilized. The number of chamber operation cycles to stabilize the process may be less than 10% of the amount otherwise used with conventional techniques.