The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2018

Filed:

Sep. 20, 2010
Applicants:

Harry Hedler, Germering, DE;

Jörg Zapf, München, DE;

Inventors:

Harry Hedler, Germering, DE;

Jörg Zapf, München, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/00 (2006.01); G01K 7/02 (2006.01); G01K 7/08 (2006.01); B81B 1/00 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81B 7/04 (2006.01); H01L 35/32 (2006.01); B29C 39/00 (2006.01); B29C 39/02 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 99/0085 (2013.01); B81B 2203/0361 (2013.01); B81B 2207/056 (2013.01); Y10T 29/49826 (2015.01); Y10T 428/24355 (2015.01);
Abstract

A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.


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