The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Nov. 14, 2014
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Ulysses Gilchrist, Reading, MA (US);

Michael L. Bufano, Belmont, MA (US);

William Fosnight, Saratoga Springs, NY (US);

Christopher Hofmeister, Holderness, NH (US);

Gerarld M. Friedman, New Ipswich, NH (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67763 (2013.01); H01L 21/6779 (2013.01); H01L 21/67326 (2013.01); H01L 21/67353 (2013.01); H01L 21/67369 (2013.01); H01L 21/67373 (2013.01); H01L 21/67376 (2013.01); H01L 21/67383 (2013.01); H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01); H01L 21/67778 (2013.01); Y10S 414/139 (2013.01);
Abstract

A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.


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