The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2018
Filed:
Dec. 28, 2015
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Kenji Konomi, Nagoya, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 1/70 (2012.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G03F 1/70 (2013.01); G06F 17/5009 (2013.01);
Abstract
According to one embodiment, an inscribed figure as circle or an oval inscribed in a rectangular pattern of designed layout data is calculated, a difference in area between a lithographic shape corresponding to the rectangular pattern and the inscribed figure is calculated, and it is determined whether the difference in area satisfies a predetermined specification.