The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Jul. 02, 2013
Applicant:

Toray Industries, Inc., Tokyo, JP;

Inventors:

Ken Horiuchi, Otsu, JP;

Atsushi Kondo, Otsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/32 (2006.01); G03F 7/30 (2006.01); B01D 21/26 (2006.01); B01D 19/00 (2006.01); B01D 19/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/32 (2013.01); B01D 19/0052 (2013.01); B01D 19/02 (2013.01); B01D 21/26 (2013.01); B01D 21/262 (2013.01); B01D 21/267 (2013.01); G03F 7/3092 (2013.01);
Abstract

The purpose of the present invention is to provide a developing solution processing device and processing method that solve problems that accompany the occurrence of scum, improve product defect rate, increase the utilization ratio of manufacturing devices, and contribute considerably to reduced manufacturing costs and other factors through highly efficient recovery of noble metals. The present invention provides a developing solution processing device provided with: a centrifuge for separating a clarified liquid and a residue by centrifugally separating out developing solution after development processing; and a defoaming device for defoaming and discharging the clarified liquid.


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