The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Sep. 25, 2014
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Beijing Boe Display Technology Co., Ltd., Beijing, CN;

Inventors:

Xiaowei Liu, Beijing, CN;

Yao Liu, Beijing, CN;

Xiangqian Ding, Beijing, CN;

Jinchao Bai, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 16/52 (2006.01); C23C 2/14 (2006.01); G01N 27/22 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); G01R 27/26 (2006.01); C23C 14/56 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); G01B 7/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 14/545 (2013.01); C23C 14/564 (2013.01); C23C 16/4401 (2013.01); C23C 16/45589 (2013.01); C23C 16/45591 (2013.01); G01N 27/228 (2013.01); G01R 27/26 (2013.01); C23C 2/14 (2013.01); G01B 7/085 (2013.01); G01B 7/105 (2013.01); H01J 37/32568 (2013.01); H01L 21/67253 (2013.01);
Abstract

A detection device includes a chamber for vacuum coating, a capacitance measurement device and a baffle mechanism located in the chamber. The baffle mechanism is a closed structure encompassed by a number of baffle walls, wherein at least one baffle wall includes a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate. The detection device may accurately detect the service life of the baffle mechanism and achieve precise management of the apparatus.


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