The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2018
Filed:
Mar. 27, 2015
Analog Devices, Inc., Norwood, MA (US);
John A. Geen, Tewksbury, MA (US);
George M. Molnar, Westford, MA (US);
Gregory S. Davis, Woburn, MA (US);
Bruce Ma, Methuen, MA (US);
Kenneth J. Cole, Somerville, MA (US);
James Timony, North Andover, MA (US);
Kenneth Flanders, Reading, MA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
Thick (i.e., greater than two microns), fine-grained, low-stress tungsten MEMS structures are fabricated at low temperatures, particularly for so-called 'MEMS last' fabrication processes (e.g., when MEMS structures are fabricated after electronic circuitry is fabricated). Means for very accurately etching structural details from the deposited tungsten layer and for strongly and stably anchoring the tungsten layer to an underlying substrate are disclosed. Also, means for removing a sacrificial layer underlying the mobile tungsten layer without damaging the tungsten or allowing it to be drawn down and stuck by surface tension is disclosed.