The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Mar. 28, 2014
Applicant:
Avago Technologies General Ip (Singapore) Pte. Ltd., Singapore, SG;
Inventors:
Steven M. Ortiz, Fort Collins, CO (US);
Suresh Sridaran, Fort Collins, CO (US);
Frank Bi, Fort Collins, CO (US);
Martha K. Small, Fort Collins, CO (US);
Assignee:
Avago Technologies General IP (Singapore) Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); H03H 9/25 (2006.01); H03H 9/17 (2006.01); H03H 9/10 (2006.01);
U.S. Cl.
CPC ...
H03H 9/25 (2013.01); H01L 41/053 (2013.01); H03H 9/1014 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01);
Abstract
An microelectronic device includes a substrate, a piezoelectric component formed over the substrate, at least one trench formed in the substrate. The piezoelectric component has a corresponding resonance frequency. The at least one trench is configured to reduce mechanical stress on the piezoelectric component, in response to force applied to the substrate, for stabilizing the resonance frequency.